Dr Steven A. Vitale Assistant Professor Class of '67 Endowed Chair Physics and Nuclear Engineering steven.vitale [at] westpoint.edu About Education Research & Publications Dr. Steven A. Vitale is serving as a Visiting Professor in the Department of Physics and Nuclear Engineering (D/PANE) at USMA. He currently serves as instructor for PH201 Physics I and collaborates with other D/PANE faculty on research efforts. Dr. Vitale also holds a position as a Senior Technical staff member in the Advanced Technology Division at MIT Lincoln Laboratory. His research spans the areas of plasma physics and solid state devices, developing novel processing technology to create emerging microelectronics capability. His work includes devices enabled by two dimensional materials, diamond, and phase change materials. In addition to these activities, his broader interests include ultralow power microelectronics, plasma science and technology for environmental, nanoelectronic, and medical applications. Dr. Vitale has also held laboratory leadership positions within the groups of Quantum Information and Integrated Nanosystems, Advanced Imaging Technology, Advanced Silicon Technology, and the Microelectronics Laboratory. Prior to joining Lincoln Laboratory, Dr. Vitale worked at Texas Instruments where he developed plasma processes for microelectronics manufacturing at the 90-nm, 65-nm, and 45-nm technology nodes. Dr. Vitale has authored over 100 publications and conference presentations and holds 11 issued patents. He has served on the executive committee for several international scientific conferences including the IEEE Subthreshold Microelectronics Conference, the IEEE S3S Conference, and the AVS International Symposium. Dr. Vitale received his PhD degree in chemical engineering from MIT, MS degree in nuclear engineering from MIT, and his BS degree in chemical engineering from Johns Hopkins University. Ph.D. Massachusetts Institute of TechnologyM.S. - Massachusetts Institute of TechnologyB.S. - Johns Hopkins University Research Interests Plasma Physics, Advanced Microelectronics, 2D Materials Current Research Novel plasma diagnostics for ionospheric characterization, Energy efficient transistors based on sliding ferroelectricity, Vertical transistors for ultra high density logic Selected Publications Popescu, C.-C., Dao, K.P., Ranno, L. , Mills, B. , Martin, L., Zhang, Y., Bono, D., Neltner, B., Gu, T., Hu, J., Aryana, K., Kim, H.J., Vitale, S., Miller, P., Roberts, C., Geiger, S., Callahan, D., Moebius, M., Kang, M., Richardson, K., Ríos, C. (2023). “An Open-Source Multi-functional Testing Platform for Optical Phase Change Materials,” Small Science, 3, 2300098.Zhu, J., Park, J.-H., Vitale, S., Mohamed, M., Wang, J., Zhang, T., Ashok, M., Xue, M., Zheng, X., Wang, Z., Hansryd, J., Chandrakasan, A., Kong, J., Palacios, T. (2023) “Low thermal budget synthesis of monolayer molybdenum disulfide for silicon back-end-of-line integration on 200 mm platform”, Nature Nanotechnology, 18, 456–463.Vitale, S.A., Miller, P., Robinson, P. , Roberts, C., Liberman, V., Du, Q., Zhang, Y., Popescu, C.-C., Shalaginov, M.Y., Kang, M., Richardson, K.A., Gu, T., Ríos, C., Hu, J. (2022) “Phase Transformation and Switching Behavior of Magnetron Plasma Sputtered Ge2Sb2Se4Te,” Advanced Photonics Research, 3, 2200202.Vitale, S.A., Hu, W., D'Onofrio, R., Soares, T., Geis, M. (2020) “Interface State Reduction by Plasma-Enhanced ALD of Homogeneous Ternary Oxides,” ACS Applied Materials & Interfaces, 12(38), 43250.Vitale, S.A., Gouker, P.M. (2013) “Gadolinium oxide coated fully depleted silicon on insulator transistors for thermal neutron dosimetry,” Nuclear Instruments and Methods in Physics Research A, 721, 45.